Extended range tuning elements for a microelectromechanical systems external cavity laser

A modified tuning element for a Littrow external cavity laser is demonstrated using microelectromechanical systems technology. The device combines a vertically etched blazed grating, a compound flexure suspension and drive elements for translating and rotating the grating. Tuning is linearized by linking the grating to a remote actuator by a flexible linkage. A simple theoretical model of the linkage is presented. Devices with electrostatic and electrothermal drives are both demonstrated by deep reactive etching of bonded silicon on insulator, and used to construct electrically tunable lasers. Prototypes show improved electromechanical characteristics and tuning over a range of 8 nm is demonstrated.